Effect of substrate temperature on the deposition of polytetrafluoroethylene by an ionization-assisted evaporation method
โ Scribed by Usui, H.
- Book ID
- 127175228
- Publisher
- AVS (American Vacuum Society)
- Year
- 1995
- Tongue
- English
- Weight
- 837 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0734-2101
- DOI
- 10.1116/1.579515
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