Effect of substrate temperature on structural and materials properties of zirconium nitride films on D9 steel substrates

✍ Scribed by K. Ashok; B. Subramanian; P. Kuppusami; M. Jayachandran

• Publisher: John Wiley and Sons
• Year: 2009
• Tongue: English
• Weight: 169 KB
• Volume: 44
• Category: Article
• ISSN: 0232-1300
• DOI: 10.1002/crat.200800630

✦ Synopsis

Abstract

Thin zirconium nitride (ZrN) films were prepared by using reactive direct current (DC) magnetron sputtering onto D9 steel substrates. XRD technique was employed to study the coatings, observing variations of crystallite size, crystallite texture and lattice constant, as a function of substrate temperature. Chemical states of the ZrN thin films were determined by X‐ray photoelectron microscopy (XPS). AFM picture showed the presence of spherical shaped grains on the top of homogeneous granular surface. The hardness and elastic modulus values were measured by nanoindendation and their values are 18.5 and 343 GPa respectively. (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)