𝔖 Bobbio Scriptorium
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Effect of substrate structure on deposition of evaporated carbon

✍ Scribed by D. B. Fischbach

Book ID
104803649
Publisher
Springer
Year
1968
Tongue
English
Weight
566 KB
Volume
3
Category
Article
ISSN
0022-2461

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The effect of substrate size on characte
The effect of substrate size on characteristics of carbon films deposited on glass plate substrates by thermal chemical vapor deposition
✍ Chen, Po-Yu ;Shiue, Sham-Tsong ;Lin, Hung-Yi πŸ“‚ Article πŸ“… 2009 πŸ› John Wiley and Sons 🌐 English βš– 258 KB

## Abstract When carbon films are prepared using thermal CVD, the properties of carbon films are affected by many factors, such as the precursor gas, deposition temperature, and working pressure. It is believed that the substrate size is also an important factor in preparing carbon films by thermal