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Effect of substrate material on the structure of carbon films obtained by plasmachemical deposition

✍ Scribed by A. V. Tyurnina; A. A. Zolotukhin; A. N. Obraztsov

Book ID
111449512
Publisher
SP MAIK Nauka/Interperiodica
Year
2006
Tongue
English
Weight
195 KB
Volume
32
Category
Article
ISSN
1063-7850

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The effect of substrate size on characte
The effect of substrate size on characteristics of carbon films deposited on glass plate substrates by thermal chemical vapor deposition
✍ Chen, Po-Yu ;Shiue, Sham-Tsong ;Lin, Hung-Yi πŸ“‚ Article πŸ“… 2009 πŸ› John Wiley and Sons 🌐 English βš– 258 KB

## Abstract When carbon films are prepared using thermal CVD, the properties of carbon films are affected by many factors, such as the precursor gas, deposition temperature, and working pressure. It is believed that the substrate size is also an important factor in preparing carbon films by thermal