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Effect of substrate-induced strain on the structural, electrical, and optical properties of polycrystalline ZnO thin films

โœ Scribed by Ghosh, R.; Basak, D.; Fujihara, S.


Book ID
111886694
Publisher
American Institute of Physics
Year
2004
Tongue
English
Weight
402 KB
Volume
96
Category
Article
ISSN
0021-8979

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Influence of substrate and film thicknes
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## Abstract Transparent Zinc Oxide (ZnO) thin films have been grown on Si (100) and Sapphire (0001) substrates by RF magnetron sputtering for different growth time intervals (10, 30 and 60 min) to study the substrate and thickness effects. All the films have been grown at a substrate temperature of