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Structural and Electrical Characteristics of ZnO Thin Films on Polycrystalline AlN Substrates

✍ Scribed by Yeon Hwa Jo; Bhaskar Chandra Mohanty; Yong Soo Cho


Book ID
109262326
Publisher
John Wiley and Sons
Year
2009
Tongue
English
Weight
592 KB
Volume
92
Category
Article
ISSN
0002-7820

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## Abstract Transparent Zinc Oxide (ZnO) thin films have been grown on Si (100) and Sapphire (0001) substrates by RF magnetron sputtering for different growth time intervals (10, 30 and 60 min) to study the substrate and thickness effects. All the films have been grown at a substrate temperature of