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Effect of substrate bias voltage on the texture and microstructure of Cu thin films deposited by ion beam deposition

✍ Scribed by Jae -Won Lim; Minoru Isshiki

Book ID: 105696580
Publisher: TechnoPress
Year: 2003
Tongue: English
Weight: 306 KB
Volume: 9
Category: Article
ISSN: 1598-9623
DOI: 10.1007/bf03027278

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