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Characteristics of ion beam deposited copper thin films as a seed layer: effect of negative substrate bias voltage

✍ Scribed by J.-W. Lim; K. Miyake; M. Isshiki

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Effect of substrate bias voltage on the

✍ Jae -Won Lim; Minoru Isshiki 📂 Article 📅 2003 🏛 TechnoPress 🌐 English ⚖ 306 KB

Effect of substrate bias voltage on the

✍ J.-W. Lim; K. Mimura; K. Miyake; M. Yamashita; M. Isshiki 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 362 KB