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Effect of substrate bias on the structure and properties of multi-element (AlCrTaTiZr)N coatings

✍ Scribed by Lai, Chia-Han; Lin, Su-Jien; Yeh, Jien-Wei; Davison, Andrew

Book ID: 121355601
Publisher: Institute of Physics
Year: 2006
Tongue: English
Weight: 757 KB
Volume: 39
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/39/21/019

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