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Influence of substrate bias, deposition temperature and post-deposition annealing on the structure and properties of multi-principal-component (AlCrMoSiTi)N coatings

✍ Scribed by Hui-Wen Chang; Ping-Kang Huang; Jien-Wei Yeh; Andrew Davison; Chun-Huei Tsau; Chih-Chao Yang

No coin nor oath required. For personal study only.

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