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Effects of substrate bias on structure and mechanical properties of (AlCrNbSiTiV)N coatings

✍ Scribed by Huang, Ping-Kang; Yeh, Jien-Wei

Book ID: 121392748
Publisher: Institute of Physics
Year: 2009
Tongue: English
Weight: 620 KB
Volume: 42
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/42/11/115401

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