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Effect of strain, substrate surface and growth rate on B-doping in selectively grown SiGe layers

✍ Scribed by R. Ghandi; M. Kolahdouz; J. Hållstedt; R. Wise; Hans Wejtmans; H.H. Radamson


Book ID
108290184
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
175 KB
Volume
517
Category
Article
ISSN
0040-6090

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