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Effect of Silicon Surface Termination on Copper Deposition in Deionized Water

✍ Scribed by Lim, Sang Woo; Mo, Renee T.; Pianetta, Piero A.; Chidsey, Christopher E. D.


Book ID
115520867
Publisher
The Electrochemical Society
Year
2001
Tongue
English
Weight
270 KB
Volume
148
Category
Article
ISSN
0013-4651

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In this paper we present reflectance measurements on silicon wafers and the dependence of the reflectance on the thickness, on the texturization and on the back metallization. Silver and aluminium have been deposited using screen printing and also vacuum evaporation as a reference. The work was inte