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Effects of silicon surface amorphization on single carbon atom deposition/implantation

✍ Scribed by Briquet, Ludovic G.V.; Philipp, Patrick; Wirtz, Tom

Book ID: 123571676
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 968 KB
Volume: 303
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2012.09.022

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