Effect of radio-frequency power levels on electron density in a confined two-frequency capacitively-coupled plasma processing tool

✍ Scribed by Karkari, S. K.; Ellingboe, A. R.

• Book ID: 120418115
• Publisher: American Institute of Physics
• Year: 2006
• Tongue: English
• Weight: 359 KB
• Volume: 88
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.2182073