In this study, we show that the optical constants of sputter-deposited chromium depend on the argon pressure used for the deposition. Higher argon pressure gives lower extinction coefficients. Sheet resistance measurements show that those materials with lower extinction coefficients also have lower
Effect of photostimulated desorption processes on optical parameters of thin-film coatings
โ Scribed by O. E. Sidoryuk; L. A. Skvortsov
- Publisher
- Springer US
- Year
- 1990
- Tongue
- English
- Weight
- 334 KB
- Volume
- 53
- Category
- Article
- ISSN
- 0021-9037
No coin nor oath required. For personal study only.
๐ SIMILAR VOLUMES
The effects of polishing pressure and abrasive on the chemical mechanical polishing of blanket and patterned aluminum thin films were investigated. The CMP process experiments were conducted using a soft pad and slurry mainly composed of acid solution and Al O abrasive. The result of the blanket fil
We report on the effective optical response of single-and multilayer periodic structures of metallodielectric nanosandwiches on the basis of rigorous, full-electrodynamic calculations by the extended layer-multiplescattering method. It is shown that the complex photonic band structure and the reflec