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Effect of oxygen partial pressure on the structural and optical properties of dc sputtered ITO thin films

✍ Scribed by L. Kerkache; A. Layadi; A. Mosser

Book ID: 116605288
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 689 KB
Volume: 485
Category: Article
ISSN: 0925-8388
DOI: 10.1016/j.jallcom.2009.06.103

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## Abstract Transparent thin films of amorphous zinc indium tin oxide were prepared at room temperature by co‐sputtering of zinc oxide and indium tin oxide. Effect of oxygen partial pressure on the optical and electrical properties of amorphous zinc indium tin oxide thin films were investigated. Co