✦ LIBER ✦

Effect of Oxygen Impurities on the Nitridation of High-Purity Silicon

✍ Scribed by D. R. MESSIER; P. WONG; A. E. INGRAM

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Effect of oxide impurities on the nitrid

✍ R. B. Guthrie; F. L. Riley 📂 Article 📅 1974 🏛 Springer 🌐 English ⚖ 243 KB

Nitridation of high-purity silicon

✍ A. Atkinson; A. J. Moulson; E. W. Roberts 📂 Article 📅 1975 🏛 Springer 🌐 English ⚖ 484 KB

Intrinsic nitridation kinetics of high-p

✍ Mostafa Maalmi; Arvind Varma 📂 Article 📅 1996 🏛 American Institute of Chemical Engineers 🌐 English ⚖ 951 KB

Effect of Oxygen Partial Pressure on Nit

✍ MAMORU MITOMO 📂 Article 📅 1975 🏛 John Wiley and Sons 🌐 English ⚖ 153 KB

Effects of oxygen and substitutional imp

✍ R. Onodera; S. Takaki; K. Abiko; H. Kimura 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 563 KB

Effect of impurities on the dielectric p

✍ T. V. Andreeva; P. P. Pikuza; T. S. Bartnitskaya; Yu. M. Goryachev; T. Ya. Kosol 📂 Article 📅 1982 🏛 Springer 🌐 English ⚖ 314 KB