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Effect of oxide impurities on the nitridation of high purity silicon

✍ Scribed by R. B. Guthrie; F. L. Riley

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Nitridation of high-purity silicon

✍ A. Atkinson; A. J. Moulson; E. W. Roberts 📂 Article 📅 1975 🏛 Springer 🌐 English ⚖ 484 KB

Intrinsic nitridation kinetics of high-p

✍ Mostafa Maalmi; Arvind Varma 📂 Article 📅 1996 🏛 American Institute of Chemical Engineers 🌐 English ⚖ 951 KB

Phase equilibria in the oxidation of imp

✍ R. O. Williams; V. J. Tennery 📂 Article 📅 1979 🏛 Springer 🌐 English ⚖ 374 KB

Effect of selected impurities on the hig

✍ J. L. Iskoe; F. F. Lange; E. S. Diaz 📂 Article 📅 1976 🏛 Springer 🌐 English ⚖ 650 KB

The effect of silica on the nitridation

✍ D. Campos-Loriz; F. L. Riley 📂 Article 📅 1976 🏛 Springer 🌐 English ⚖ 272 KB

High temperature oxidation of silicon ni

✍ E.A. Pugach 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 224 KB