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Effect of impurities on the dielectric properties of silicon nitride

✍ Scribed by T. V. Andreeva; P. P. Pikuza; T. S. Bartnitskaya; Yu. M. Goryachev; T. Ya. Kosolapova


Book ID
112412650
Publisher
Springer
Year
1982
Tongue
English
Weight
314 KB
Volume
21
Category
Article
ISSN
1573-9066

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