Effect of oxidation on orientation-dependent boron diffusion in silicon : W. G. Allen. Solid St. Electron. 16 (1973), p. 709

• Publisher: Elsevier Science
• Year: 1973
• Tongue: English
• Weight: 114 KB
• Volume: 12
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(73)90092-9