Orientation dependence of the diffusion of boron in silicon : W. G. Allen and K. V. Anand. Solid State Electron.14 (1971), p. 397

• Publisher: Elsevier Science
• Year: 1972
• Tongue: English
• Weight: 109 KB
• Volume: 11
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(72)90788-3