Comparison of models for redistribution of dopants in silicon during thermal oxidation : W. G. Allen and C. Atkinson. Solid St. Electron.16, 1283 (1973)

• Publisher: Elsevier Science
• Year: 1974
• Tongue: English
• Weight: 106 KB
• Volume: 13
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(74)90176-0