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Effect of O2(a1Δg) on plasma structures in oxygen radio frequency discharges

✍ Scribed by Shibata, Mari; Nakano, Nobuhiko; Makabe, Toshiaki


Book ID
120065998
Publisher
American Institute of Physics
Year
1996
Tongue
English
Weight
384 KB
Volume
80
Category
Article
ISSN
0021-8979

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