๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Effect of driving frequency on plasma property in radio frequency and very high frequency magnetron sputtering discharges

โœ Scribed by Huang, Fupei; Ye, Chao; He, Haijie; Liu, Yi; Wang, Xiangying; Ning, Zhaoyuan

Book ID
121457346
Publisher
Institute of Physics
Year
2013
Tongue
English
Weight
647 KB
Volume
23
Category
Article
ISSN
0963-0252

No coin nor oath required. For personal study only.

๐Ÿ“œ SIMILAR VOLUMES

Frequency effects on the dielectric prop
Frequency effects on the dielectric properties of AlN film deposited by radio frequency reactive magnetron sputtering
โœ Xiufeng Song; Renli Fu; Hong He ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 348 KB

Applications insulated metal substrates (IMS) for high-density and high-power mounting are greatly extending with miniaturizing of electronic components. Recently, aluminum nitride film has been used as a potential insulator and/or passivation material in insulated metal substrate because of its hig