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Effect of laser irradiation on the oxidizer transport and self-ogranization of the interfacial layer during thermal oxidation of silicon

โœ Scribed by A. M. Khoviv; I. N. Nazarenko


Book ID
110666722
Publisher
SP MAIK Nauka/Interperiodica
Year
2000
Tongue
English
Weight
201 KB
Volume
36
Category
Article
ISSN
0020-1685

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