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Effects of ion irradiation on thermally formed silicides in the presence of interfacial oxide

✍ Scribed by C.-D. Lien; M.-A. Nicolet; Peter Williams

Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 471 KB
Volume: 136
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(86)90109-4

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