Femtosecond laser irradiation of metal and thermal oxide layers on silicon: studies utilising cross-sectional transmission electron microscopy

✍ Scribed by T.H.R. Crawford; J. Yamanaka; E.M. Hsu; G.A. Botton; H.K. Haugen

• Publisher: Springer
• Year: 2008
• Tongue: English
• Weight: 432 KB
• Volume: 91
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s00339-008-4433-2