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Effect of irradiation with intermediate-energy ions on structure and electrophysical properties of silicon dioxide films in a mos system

✍ Scribed by T. A. Kholomina

Book ID: 112426324
Publisher: Springer
Year: 1978
Tongue: English
Weight: 467 KB
Volume: 21
Category: Article
ISSN: 1573-9228
DOI: 10.1007/bf00892468

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