Effect of ion bombardment on the phase composition and mechanical properties of diamond-like carbon films

✍ Scribed by Karaseov, P. A.; Podsvirov, O. A.; Titov, A. I.; Karabeshkin, K. V.; Vinogradov, A. Ya.; Belyakov, V. S.; Arkhipov, A. V.; Nikulina, L. M.; Shakhmin, A. L.; Shubina, E. N.; Karasev, N. N.

• Book ID: 121548624
• Publisher: Pleiades Publishing
• Year: 2014
• Tongue: English
• Weight: 275 KB
• Volume: 8
• Category: Article
• ISSN: 1027-4510
• DOI: 10.1134/S1027451013060098