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Effect of interfacial stress at the Si/SiO2, interface on the diffusion of Ga in Si through SiO2

✍ Scribed by Jain, G. C. ;Chakravarty, B. C. ;Prasad, A.

Publisher: John Wiley and Sons
Year: 1981
Tongue: English
Weight: 405 KB
Volume: 64
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2210640210

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