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Effect of in situ Pt bottom electrode deposition and of Pt top electrode preparation on PZT thin films properties

โœ Scribed by B Vilquin; G Le Rhun; R Bouregba; G Poullain; H Murray


Book ID
108417815
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
511 KB
Volume
195
Category
Article
ISSN
0169-4332

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