✦ LIBER ✦
Reactive Ion Etching of Sol-Gel derived PZT thin film and Pt/Ti bottom electrode for FRAM
✍ Scribed by Ting-Ao, Tang; Zheng, Chen; Ning, Li; Si-Xun, Zou
- Book ID
- 127342597
- Publisher
- Taylor and Francis Group
- Year
- 1999
- Tongue
- English
- Weight
- 230 KB
- Volume
- 232
- Category
- Article
- ISSN
- 0015-0193
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