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Effect of hydrogen on hardness of amorphous silicon

✍ Scribed by P. Danesh; B. Pantchev; J. Wiezorek; B. Schmidt; D. Grambole

Book ID: 106022331
Publisher: Springer
Year: 2010
Tongue: English
Weight: 336 KB
Volume: 102
Category: Article
ISSN: 1432-0630
DOI: 10.1007/s00339-010-6026-0

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