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Hardness measurements of amorphous silicon films

✍ Scribed by Zhong Boqiang


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
111 KB
Volume
42
Category
Article
ISSN
0042-207X

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Photoelectrochemical measurements of amo
✍ J. Herrero; M.T. GutiΓ©rrez πŸ“‚ Article πŸ“… 1991 πŸ› Elsevier Science 🌐 English βš– 444 KB

Amorphous silicon, a-Si, thin films were prepared from SiH, by plasma glow discharge. Film characterization was accomplished using ir and -vfi optical measurements. Differences observed in the energy gap values, optically and photoelectrochemically determined, were correlated with the substrate temp