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Effect of hydrogen flow rate on the properties of magnetron sputtered hydrogenated microcrystalline silicon

โœ Scribed by R. Banerjee; S. N. Sharma; A. K. Bandyopadhyay; A. K. Batabyal; A. K. Barua


Publisher
Springer
Year
1993
Tongue
English
Weight
905 KB
Volume
12
Category
Article
ISSN
0261-8028

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