✦ LIBER ✦
Effect of hydrogen on the deposition rate for planar rf magnetron sputtering of hydrogenated amorphous silicon: James B Webb,J Appl Phys, 53 (12), 1982, 9043–9048
- Publisher
- Elsevier Science
- Year
- 1985
- Tongue
- English
- Weight
- 175 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0042-207X
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