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Effect of helium partial pressure on DC-magnetron sputtering of Co–Cr films

✍ Scribed by H Jia; J Veldeman; M Burgelman

Book ID: 114229010
Publisher: Elsevier Science
Year: 1999
Tongue: English
Weight: 194 KB
Volume: 193
Category: Article
ISSN: 0304-8853
DOI: 10.1016/s0304-8853(98)00415-6

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