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Effect of Growth Parameters on the Residual Stress and Dislocation Density of Czochralski-Grown Silicon Crystals

✍ Scribed by DeNicola, R. O.

Book ID: 121501513
Publisher: American Institute of Physics
Year: 1971
Tongue: English
Weight: 756 KB
Volume: 42
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1659763

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