Effect of Enhanced Plasma Density on the Properties of Aluminium Doped Zinc Oxide Thin Films Produced by DC Magnetron Sputtering

✍ Scribed by Jun Gong; Xiaobo Zhang; Zhiliang Pei; Chao Sun; Lishi Wen

• Book ID: 117695121
• Publisher: Allerton Press Inc
• Year: 2011
• Tongue: English
• Weight: 622 KB
• Volume: 27
• Category: Article
• ISSN: 1005-0302
• DOI: 10.1016/s1005-0302(11)60080-7