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Effect of electrical properties on thermal diffusivity of amorphous indium zinc oxide films

✍ Scribed by Ashida, T.; Miyamura, A.; Sato, Y.; Yagi, T.; Taketoshi, N.; Baba, T.; Shigesato, Y.

Book ID
125492559
Publisher
AVS (American Vacuum Society)
Year
2007
Tongue
English
Weight
765 KB
Volume
25
Category
Article
ISSN
0734-2101

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Effect of oxygen partial pressure on optical and electrical properties of co-sputtered amorphous zinc indium tin oxide thin films
✍ Saji, K. J. ;Jayaraj, M. K. πŸ“‚ Article πŸ“… 2008 πŸ› John Wiley and Sons 🌐 English βš– 298 KB

## Abstract Transparent thin films of amorphous zinc indium tin oxide were prepared at room temperature by co‐sputtering of zinc oxide and indium tin oxide. Effect of oxygen partial pressure on the optical and electrical properties of amorphous zinc indium tin oxide thin films were investigated. Co