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Effect of dual implantation on the amphoteric behavior of group IV ion implanted GaAs

✍ Scribed by H. Kräutle

Publisher: Elsevier Science
Year: 1981
Weight: 355 KB
Volume: 182-183
Category: Article
ISSN: 0029-554X
DOI: 10.1016/0029-554x(81)90787-4

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