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Dual implantation and amphoteric behavior of Ge implants in GaAs

✍ Scribed by Y.S. Park; Y.K. Yeo; F.L. Pedrotti

Publisher: Elsevier Science
Year: 1981
Weight: 621 KB
Volume: 182-183
Category: Article
ISSN: 0029-554X
DOI: 10.1016/0029-554x(81)90786-2

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