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Co-implantation of Mg and Si in GaAs MESFETs

โœ Scribed by J. Kuzmik; T. Lalinsky; P. Seidl


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
382 KB
Volume
36
Category
Article
ISSN
0038-1101

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๐Ÿ“œ SIMILAR VOLUMES


Electrical Properties of the Si Implanta
โœ Wei-Chih Lai; M. Yokoyama; Chiung-Chi Tsai; Chen-Shiung Chang; Jan-Dar Guo; Jian ๐Ÿ“‚ Article ๐Ÿ“… 1999 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 122 KB ๐Ÿ‘ 2 views

This work performs Si ion implantation to activate and convert the electrical conduction of p-GaN films from p-type to n-type. Multiple implantation method is used to form a uniform Si implanted region in the p-type GaN epitaxial layer. Implantation energies for the multiple implantation are 40, 100