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Effect of Dry Etching of TiO 2 Thin Films Using Inductively Coupled Plasma

✍ Scribed by Choi, Kyung-Rok; Woo, Jong-Chang; Joo, Young-Hee; Kim, Chang-Il

Book ID: 126646085
Publisher: Taylor and Francis Group
Year: 2013
Tongue: English
Weight: 562 KB
Volume: 456
Category: Article
ISSN: 0015-0193
DOI: 10.1080/00150193.2013.846201

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