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Effect of deuterium on the growth process of poly-silicon film by hot-wire chemical vapour deposition

✍ Scribed by J.K Rath; R.E.I Schropp

Book ID: 117145633
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 171 KB
Volume: 299-302
Category: Article
ISSN: 0022-3093
DOI: 10.1016/s0022-3093(01)01171-1

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