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Effect of deposition parameters on the electrical and metallurgical properties of Au-Zn contacts to p-type InP

✍ Scribed by Malina, V; Micheli, V; Kohout, J; Berkov, D

Book ID
120458876
Publisher
Institute of Physics
Year
1994
Tongue
English
Weight
651 KB
Volume
9
Category
Article
ISSN
0268-1242

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Rapid thermal annealing effects on elect
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## Abstract The effects of rapid thermal annealing on the electrical and structural properties of Pd/Au Schottky contacts to n‐type InP(111) have been investigated by current–voltage (__I__ –__V__), capacitance–voltage (__C__ –__V__) and X‐ray diffraction (XRD) measurements. The barrier height of t