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Effect of concurrent irradiation with electrons on ion-induced amorphization in silicon

✍ Scribed by Abe Hiroaki; Kinoshita Chiken; Paul R. Okamoto; Lynn E. Rehn

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 459 KB
Volume: 212-215
Category: Article
ISSN: 0022-3115
DOI: 10.1016/0022-3115(94)90075-2

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