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Effect of high energy ion irradiation on silicon substrate in a pulsed plasma device

✍ Scribed by H. Bhuyan; M. Favre; E. Valderrama; G. Avaria; F. Guzman; H. Chuaqui; I. Mitchell; E. Wyndham; R. Saavedra; M. Paulraj

Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
372 KB
Volume
254
Category
Article
ISSN
0169-4332

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