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Effect of Cl[sub 2] Plasma Treatment on Metal Contacts to n-Type and p-Type GaN

✍ Scribed by Jang, Ho Won; Lee, Jong-Lam

Book ID: 119992823
Publisher: The Electrochemical Society
Year: 2003
Tongue: English
Weight: 133 KB
Volume: 150
Category: Article
ISSN: 0013-4651
DOI: 10.1149/1.1595664

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